张进成
张进成分别于1998年、2001年、2004年在西安电子科技大学获得微电子技术专业学术学位、微电子学与固体电子学硕士学位、博士学位。
1998年1月入党,[4]2001年3月留校任教,分别于2003年、2005年、2009年晋升讲师、副教授和教授(破格),2010年被聘任为博士生导师。2008年起担任宽带隙半导体技术国家级重点实验室副主任,2016年起担任陕西省石墨烯联合实验室(西电分部)主任,2019年起担任半导体国家工程研究中心副主任。2014年6月至8月在比利时鲁汶大学(欧洲微电子研究中心IMEC)作访问学者。2019年9月至11月在国家教育行政学院第58期中青年干部培训班学习。2014年10月至2018年8月担任微电子学院副院长,2018年9月至今担任科学研究院院长,2020年7月起任校长助理。1998年起师从中国科学院院士郝跃教授,从事宽禁带半导体电子材料与器件研究,是我国乃至国际上最早开展宽禁带(第三代)半导体电子器件与材料研究的知名学者之一。[1]
职务任免
2021年11月16日,经教育部研究决定:任命张进成为西安电子科技大学副校长(试用期一年)。[2]
科技部战略先进电子材料专家组成员
国防科工局配套信息功能材料专家组成员
中国航天科技集团公司元器件应用专业组专家
新型半导体功率器件国家重点实验室学术委员会委员
微光夜视技术国家级重点实验室学术委员会委员
国务院学位办电子科学与技术学科评议组秘书(2014-2018)
第三代半导体产业技术创新战略联盟青年执行委员会副主任[1]
国家杰出青年基金获得者(2019年)
国家万人计划领军人才(2019年)
科技部中青年科技创新领军人才(2018年)
教育部长江学者特聘教授(2016年)
国务院政府特殊津贴专家(2016年)
陕西省重点科技创新团队负责人(2017年)
陕西省三秦学者特聘教授(2016年)
陕西省三五人才(2010年)
陕西省青年科技新星(2010年)
教育部新世纪优秀人才(2007年)
陕西省高等学校优秀青年教师(2005年)[1]
研究方向宽禁带半导体(GaN)器件、材料与设备
微波毫米波太赫兹集成电路与工艺
超宽禁带半导体(金刚石、氧化镓、氮化铝)器件、材料与设备
石墨烯及二维半导体器件与材料
柔性新能源与可穿戴器件[1]
科研项目始终面向国家重大需求、面向国际学术前沿、面向国民经济主战场,坚持顶天立地,坚持学术研究与工程应用并重
主持完成了国家科技重大专项、国家973计划、863计划、国家重点研发计划、国家自然基金重大项目、重点项目等50余项国家级重大重点项目,验收结果均为优秀或良好。
目前在研主持国家科技重大专项“大功率高速整流器件”(国拨经费9994.78万元,西电历史上最高)、国家科技重大专项“毫米波放大器芯片”、国家重点研发计划“基于极化诱导能带工程的GaN基电子器件新结构、新工艺和可靠性研究”、国家自然基金委员会杰出青年基金项目“宽禁带半导体电子器件”等10余项课题。[1]
主讲课程本科生课程《模拟电子技术基础》、《高频电子线路》
研究生课程《宽禁带半导体材料与器件》,《集成电路工艺原理》[1]
学术成果论文专著
发表SCI论文300余篇,第一/通信作者100余篇,包括IEEE期刊论文64篇,Applied Physics Letters论文23篇,SCI他引3000余次,出版专著3部,教材1部。
[1]陈大正,袁鹏,赵胜雷,刘爽,辛倩,宋秀峰,颜世琪,张雅超,习鹤,朱卫东,张苇杭,张家祺,周弘,张春福,张进成,郝跃.基于p-SnO帽层栅的高阈值增强型AlGaN/GaN HEMTs(英文)[J].Science China Materials,,:1-8.
[2]李若晗,费武雄,唐锐,吴照玺,段超,张涛,朱丹,张苇杭,赵胜雷,张进成,郝跃.Investigation on threshold voltage of p-channel GaN MOSFETs based on p-GaN/AlGaN/GaN heterostructure[J].Chinese Physics B,2021,30(08):560-564.
[3]苏春旭,温暐,费武雄,毛维,陈佳杰,张苇杭,赵胜雷,张进成,郝跃.Design and simulation of AlN-based vertical Schottky barrier diodes[J].Chinese Physics B,2021,30(06):582-586.
[4]何元浩,毛维,杜鸣,彭紫玲,王海永,郑雪峰,王冲,张进成,郝跃.Vertical polarization-induced doping InN/InGaN heterojunction tunnel FET with hetero T-shaped gate[J].Chinese Physics B,2021,30(05):721-727.
[5]朱家铎,陈兴,尚蔚,宁静,王东,张进成,郝跃.二维磁性VSe_2与过渡金属的范德华接触及其高性能自旋场效应晶体管研究(英文)[J].Science China(Materials),2021,64(11):2786-2794.
[6]张泽阳,陈丹丹,朱卫东,马俊骁,柴文明,陈大正,张进成,张春福,郝跃.基于缓慢卤素交换处理CsPbIBr_2薄膜制备高性能碳基全无机钙钛矿太阳电池(英文)[J].Science China(Materials),2021,64(09):2107-2117.
[7]杨士奇,任泽阳,张金风,何琦,苏凯,张进成,郭怀新,郝跃.硅基氮化镓异质结材料与多晶金刚石集成生长研究[J].固体电子学研究与进展,2021,41(01):18-23.
[8]杨翠,彭国良,毛维,郑雪峰,王冲,张进成,郝跃.Novel CMOS image sensor pixel to improve charge transfer speed and efficiency by overlapping gate and temporary storage diffusing node[J].Chinese Physics B,2021,30(01):687-693.
[9]张思玉,周龙,张冰娟,苏杰,张进成,常晶晶,郝跃.钙钛矿材料微观结构设计与性能提高:第一性原理计算[A].中国化工学会化工新材料专业委员会、苏州大学.2020第四届全国太阳能材料与太阳能电池学术研讨会摘要集[C].中国化工学会化工新材料专业委员会、苏州大学:中科能合工程技术研究院(北京)有限公司,2020:74-75.
[10]张晋,胡壮壮,穆文祥,田旭升,冯倩,贾志泰,张进成,陶绪堂,郝跃.高质量氧化镓单晶及肖特基二极管的制备[J].人工晶体学报,2020,49(11):2194-2199.
[11]张璐,宁静,王东,沈雪,董建国,张进成.AlGaN/GaN HEMT的恒压电应力退化研究[J].微电子学,2020,50(02):276-280.
[12]王中旭,杜林,刘俊伟,王颖,江芸,季思蔚,董士伟,陈伟伟,谭骁洪,李金龙,李小军,赵胜雷,张进成,郝跃.Breakdown voltage enhancement in GaN channel and AlGaN channel HEMTs using large gate metal height[J].Chinese Physics B,2020,29(02):485-489.
[13]张金风,徐佳敏,任泽阳,何琦,许晟瑞,张春福,张进成,郝跃.不同晶面的氢终端单晶金刚石场效应晶体管特性[J].物理学报,2020,69(02):254-261.
[14]任泽阳,刘俊,苏凯,张金风,张进成,许晟瑞,郝跃.Multiple enlarged growth of single crystal diamond by MPCVD with PCD-rimless top surface[J].Chinese Physics B,2019,28(12):356-361.
[15]冯晓丽,张进成,郑雪峰.面向国家急需,构建“三位一体”集成电路人才培养模式的改革与实践[J].电子元器件与信息技术,2019,3(11):122-125.
[16]王婷婷,王霄,李小波,张进成,敖金平.Temperature-Dependent Characteristics of GaN Schottky Barrier Diodes with TiN and Ni Anodes[J].Chinese Physics Letters,2019,36(05):54-58.
[17]敬莹,韩根全,刘艳,张进成,郝跃.Phonon Limited Electron Mobility in Germanium FinFETs:Fin Direction Dependence[J].Chinese Physics Letters,2019,36(02):54-58.
[18]赵胜雷,王之哲,陈大正,王茂俊,戴扬,马晓华,张进成,郝跃.1.8-kV circular AlGaN/GaN/AlGaN double-heterostructure high electron mobility transistor[J].Chinese Physics B,2019,28(02):391-394.
[19]尹国福,张进成,任西,韩克华,李黎明.可寻址起爆网络系统设计及可行性[J].含能材料,2019,27(05):426-433.
[20]张雅超,王之哲,郭蕊,刘鸽,包为民,张进成,郝跃.High-performance InAlGaN/GaN enhancement-mode MOS-HEMTs grown by pulsed metal organic chemical vapor deposition[J].Chinese Physics B,2019,28(01):634-638.
[21]梁佳博,马佩军,童浪,张进成,张玉明.依据学科特色探索教育部重点实验室高效运行管理举措——基于宽禁带半导体材料教育部重点实验室建设探索与实践[J].课程教育研究,2018,(40):15-16.
[22]王冲,王鑫,郑雪峰,王允,何云龙,田野,何晴,吴忌,毛维,马晓华,张进成,郝跃.Characteristics and threshold voltage model of GaN-based FinFET with recessed gate[J].Chinese Physics B,2018,27(09):539-543.
[23]任泽阳,张金风,张进成,许晟瑞,张春福,苏凯,李姚,郝跃.Growth and Characterization of the Laterally Enlarged Single Crystal Diamond Grown by Microwave Plasma Chemical Vapor Deposition[J].Chinese Physics Letters,2018,35(07):127-130.
[24]毛维,王海永,石朋毫,王晓飞,杜鸣,郑雪峰,王冲,马晓华,张进成,郝跃.Low specific on-resistance GaN-based vertical heterostructure field effect transistors with nonuniform doping superjunctions[J].Chinese Physics B,2018,27(04):430-435.
[25]张金风,杨鹏志,任泽阳,张进成,许晟瑞,张春福,徐雷,郝跃.高跨导氢终端多晶金刚石长沟道场效应晶体管特性研究[J].物理学报,2018,67(06):250-255.
[26]林志宇,陈智斌,张进成,许晟瑞,姜腾,罗俊,郭立新,郝跃.Polar Dependence of Threading Dislocation Density in GaN Films Grown by Metal-Organic Chemical Vapor Deposition[J].Chinese Physics Letters,2018,35(02):63-66.
[27]张译,韩根全,刘艳,刘欢,张进成,郝跃.Ohmic Contact at Al/TiO_2/n-Ge Interface with TiO_2 Deposited at Extremely Low Temperature[J].Chinese Physics Letters,2018,35(02):122-125.
[28]张力,张金风,张苇杭,张涛,徐雷,张进成,郝跃.Robust Performance of AlGaN-Channel Metal-Insulator-Semiconductor High-Electron-Mobility Transistors at High Temperatures[J].Chinese Physics Letters,2017,34(12):79-82.
[29]张力,林志宇,罗俊,王树龙,张进成,郝跃,戴扬,陈大正,郭立新.具有p-GaN岛状埋层耐压结构的横向AlGaN/GaN高电子迁移率晶体管[J].物理学报,2017,66(24):251-256.
[30]任泽阳,张金风,张进成,许晟瑞,张春福,全汝岱,郝跃.单晶金刚石氢终端场效应晶体管特性[J].物理学报,2017,66(20):239-245.
[31]毛维,王海永,王晓飞,杜鸣,张金风,郑雪峰,王冲,马晓华,张进成,郝跃.Improvement of reverse blocking performance in vertical power MOSFETs with Schottky–drain-connected semisuperjunctions[J].Chinese Physics B,2017,26(04):429-436.
[32]冯兰胜,过润秋,张进成.MOCVD反应室流场分析及其对GaN生长的影响[J].西安电子科技大学学报,2017,44(01):171-175.
[33]许晟瑞,赵颖,蒋仁渊,姜腾,任泽阳,张进成,郝跃.Semipolar(1122) and polar(0001) InGaN grown on sapphire substrate by using pulsed metal organic chemical vapor deposition[J].Chinese Physics B,2017,26(02):471-476.
[34]杨凌,周小伟,马晓华,吕玲,曹艳荣,张进成,郝跃.Low power fluorine plasma effects on electrical reliability of AlGaN/GaN high electron mobility transistor[J].Chinese Physics B,2017,26(01):437-441.
[35]毛维,范举胜,杜鸣,张金风,郑雪峰,王冲,马晓华,张进成,郝跃.Analysis of the modulation mechanisms of the electric field and breakdown performance in AlGaN/GaN HEMT with a T-shaped field-plate[J].Chinese Physics B,2016,25(12):434-438.
[36]赵颖,许晟瑞,林志宇,张进成,姜腾,付梦笛,朱家铎,陆琴,郝跃.C-Implanted N-Polar GaN Films Grown by Metal Organic Chemical Vapor Deposition[J].Chinese Physics Letters,2016,33(12):142-145.
[37]何云龙,王冲,宓珉瀚,郑雪峰,张濛,赵梦荻,张恒爽,陈立香,张进成,马晓华,郝跃.Recessed-gate quasi-enhancement-mode AlGaN/GaN high electron mobility transistors with oxygen plasma treatment[J].Chinese Physics B,2016,25(11):474-479.
[38]王新强,黎大兵,刘斌,孙钱,张进成.大失配、强极化第三代半导体材料体系生长动力学和载流子调控规律[J].发光学报,2016,37(11):1305-1309.
[39]韩根全,张春福,张进成,成步文,郝跃.非硅微电子学:锗与锗锡场效应晶体管[J].中国科学:物理学力学天文学,2016,46(10):26-42.
[40]冯兰胜,过润秋,张进成.垂直式MOCVD中生长参数对GaN材料生长的影响[J].西安电子科技大学学报,2016,43(05):178-182.
[41]全汝岱,张进成,张雅超,张苇航,任泽阳,郝跃.Fabrication of InAlGaN/GaN High Electron Mobility Transistors on Sapphire Substrates by Pulsed Metal Organic Chemical Vapor Deposition[J].Chinese Physics Letters,2016,33(10):149-152.
[42]王冲,赵梦荻,何云龙,郑雪峰,张坤,魏晓晓,毛维,马晓华,张进成,郝跃.Photoresponse and trap characteristics of transparent AZO-gated AlGaN/GaN HEMT[J].Chinese Physics B,2016,25(10):525-528.
[43]全汝岱,张进成,薛军帅,赵一,宁静,林志宇,张雅超,任泽阳,郝跃.Fabrication of GaN-Based Heterostructures with an InA1GaN/AlGaN Composite Barrier[J].Chinese Physics Letters,2016,33(08):131-134.
[44]段小玲,张进成,肖明,赵一,宁静,郝跃.Groove-type channel enhancement-mode Al GaN/GaN MIS HEMT with combined polar and nonpolar AlGaN/GaN heterostructures[J].Chinese Physics B,2016,25(08):344-350.
[45]谷文萍,张进成,张林,徐小波,刘盼芝.GaN基材料和器件的质子辐照效应[J].半导体技术,2016,41(07):514-519.
[46]冯兰胜,过润秋,张进成.GaN薄膜外延过程的动力学蒙特卡洛仿真[J].西安电子科技大学学报,2016,43(03):167-171.
[47]罗俊,赵胜雷,林志宇,张进成,马晓华,郝跃.Enhancement of Breakdown Voltage in AlGaN/GaN High Electron Mobility Transistors Using Double Buried p-Type Layers[J].Chinese Physics Letters,2016,33(06):125-128.
[48]许晟瑞,赵颖,姜腾,张进成,李培咸,郝跃.Improved Semipolar(11(2|-)2) GaN Quality Grown on m-Plane Sapphire Substrates by Metal Organic Chemical Vapor Deposition Using Self-Organized SiN_x Interlayer[J].Chinese Physics Letters,2016,33(06):154-156.
[49]王冲,魏晓晓,何云龙,郑雪峰,马晓华,张进成,郝跃.Effects of the fluorine plasma treatment on low-density drain AlGaN/GaN HEMT[J].Journal of Semiconductors,2016,37(06):96-100.
[50]全汝岱,张进成,许晟瑞,薛军帅,赵一,宁静,林志宇,任泽阳,郝跃.Growth of InAlGaN Quaternary Alloys by Pulsed Metalorganic Chemical Vapor Deposition[J].Chinese Physics Letters,2016,33(04):143-146.
[51]张雅超,周小伟,许晟瑞,陈大正,王之哲,汪星,张金风,张进成,郝跃.Superior material qualities and transport properties of InGaN channel heterostructure grown by pulsed metal organic chemical vapor deposition[J].Chinese Physics B,2016,25(01):800-805.
[52]王冲,赵梦荻,裴九清,何云龙,李祥东,郑雪峰,毛维,马晓华,张进成,郝跃.AlGaN/GaN双异质结F注入增强型高电子迁移率晶体管[J].物理学报,2016,65(03):387-392.
[53]罗俊,赵胜雷,宓珉瀚,陈伟伟,侯斌,张进成,马晓华,郝跃.Effect of gate length on breakdown voltage in AlGaN/GaN high-electron-mobility transistor[J].Chinese Physics B,2016,25(02):425-429.
[54]李祥东,张进成,郭振兴,江海清,邹瑜,张苇杭,何云龙,蒋仁渊,赵胜雷,郝跃.Al_(0.30)Ga_(0.70)N/GaN/Al_(0.07)Ga_(0.93)N Double Heterostructure High Electron Mobility Transistors with a Record Saturation Drain Current of 1050 mA/mm[J].Chinese Physics Letters,2015,32(11):114-117.
[55]罗俊,赵胜雷,宓珉瀚,侯斌,杨晓蕾,张进成,马晓华,郝跃.Trap states induced by reactive ion etching in AlGaN/GaN high-electron-mobility transistors[J].Chinese Physics B,2015,24(11):464-467.
[56]张鹏,赵胜雷,薛军帅,祝杰杰,马晓华,张进成,郝跃.Investigation of trap states in Al_2O_3 InAlN/GaN metal–oxide–semiconductor high-electron-mobility transistors[J].Chinese Physics B,2015,24(12):509-512.
[57]蒋仁渊,许晟瑞,张进成,姜腾,江海清,王之哲,樊永祥,郝跃.Morphological and Microstructural Evolution and Related Impurity Incorporation in Non-Polar a-Plane GaN Grown on r-Sapphire Substrates[J].Chinese Physics Letters,2015,32(09):158-161.
[58]姜腾,许晟瑞,张进成,林志宇,蒋仁渊,郝跃.Growth of a-Plane GaN Films on r-Plane Sapphire by Combining Metal Organic Vapor Phase Epitaxy with the Hydride Vapor Phase Epitaxy[J].Chinese Physics Letters,2015,32(08):177-180.
[59]李祥东,张进成,邹瑜,马学智,刘畅,张苇杭,温慧娟,郝跃.AlGaN Channel High Electron Mobility Transistors with an Al_xGa_(1-x)N/GaN Composite Buffer Layer[J].Chinese Physics Letters,2015,32(07):153-156.
[60]郝跃,张金风,张进成,马晓华,郑雪峰.氮化物半导体电子器件新进展[J].科学通报,2015,60(10):874-881.
[61]张鹏,赵胜雷,侯斌,王冲,郑雪峰,马晓华,张进成,郝跃.Improvement of the off-state breakdown voltage with field plate and low-density drain in AlGaN/GaN high-electron mobility transistors[J].Chinese Physics B,2015,24(03):336-339.
[62]宓珉瀚,张凯,赵胜雷,王冲,张进成,马晓华,郝跃.Improved performance of AlGaN/GaN HEMT by N_2O plasma pre-treatment[J].Chinese Physics B,2015,24(02):386-390.
[63]郑雪峰,范爽,陈永和,康迪,张建坤,王冲,默江辉,李亮,马晓华,张进成,郝跃.Transport mechanism of reverse surface leakage current in AlGaN/GaN high-electron mobility transistor with SiN passivation[J].Chinese Physics B,2015,24(02):380-385.
[64]赵一,张进成,薛军帅,周小伟,许晟瑞,郝跃.Influence of compressive strain on the incorporation of indium in InGaN and InAlN ternary alloys[J].Chinese Physics B,2015,24(01):444-447.
[65]孙伟伟,郑雪峰,范爽,王冲,杜鸣,张凯,陈伟伟,曹艳荣,毛维,马晓华,张进成,郝跃.Degradation mechanism of enhancement-mode AlGaN/GaN HEMTs using fluorine ion implantation under the on-state gate overdrive stress[J].Chinese Physics B,2015,24(01):448-452.
[66]赵胜雷,宓珉瀚,侯斌,罗俊,王毅,戴杨,张进成,马晓华,郝跃.Mechanism of improving forward and reverse blocking voltages in AlGaN/GaN HEMTs by using Schottky drain[J].Chinese Physics B,2014,23(10):476-480.
[67]武玫,郑大勇,王媛,陈伟伟,张凯,马晓华,张进成,郝跃.Schottky forward current transport mechanisms in AlGaN/GaN HEMTs over a wide temperature range[J].Chinese Physics B,2014,23(09):413-417.
[68]赵胜雷,王媛,杨晓蕾,林志宇,王冲,张进成,马晓华,郝跃.Reverse blocking enhancement of drain field plate in Schottky-drain AlGaN/GaN high-electron mobility transistors[J].Chinese Physics B,2014,23(09):403-407.
[69]毛维,佘伟波,杨翠,张超,张进成,马晓华,张金风,刘红侠,杨林安,张凯,赵胜雷,陈永和,郑雪峰,郝跃.A two-dimensional fully analytical model with polarization effect for off-state channel potential and electric field distributions of GaN-based field-plated high electron mobility transistor[J].Chinese Physics B,2014,23(08):491-498.
[70]宓珉瀚,张凯,陈兴,赵胜雷,王冲,张进成,马晓华,郝跃.Non-recessed-gate quasi-E-mode double heterojunction AlGaN/GaN high electron mobility transistor with high breakdown voltage[J].Chinese Physics B,2014,23(07):685-688.
[71]史永贵,王东,张进成,张鹏,史学芳,郝跃.化学气相沉积法生长石墨烯的研究[J].人工晶体学报,2014,43(07):1620-1625.
[72]姚艳丽,张进成.氮化对蓝宝石衬底上AlGaN/GaN异质结材料性能的影响[J].微电子学,2014,44(03):388-391.
[73]李亮,杨林安,薛军帅,曹荣涛,许晟瑞,张进成,郝跃.Improved crystal quality of GaN film with the in-plane lattice-matched In_(0.17)Al_(0.83)N interlayer grown on sapphire substrate using pulsed metal organic chemical vapor deposition[J].Chinese Physics B,2014,23(06):482-487.
[74]张金风,聂玉虎,周勇波,田坤,哈微,肖明,张进成,郝跃.Depth-dependent mosaic tilt and twist in GaN epilayer:An approximate evaluation[J].Chinese Physics B,2014,23(06):573-577.
[75]唐诗,张春福,陈大正,王之哲,张进成.空穴传输层对钙钛矿太阳能电池性能的影响[A].中国可再生能源学会光化学专业委员会.第一届新型太阳能电池暨钙钛矿太阳能电池学术研讨会论文集[C].中国可再生能源学会光化学专业委员会:中国科学院物理研究所清洁能源实验室,2014:53.
[76]陈大正,张春福,王之哲,唐诗,张进成,郝跃.基于AZO/Ca阴极的“ITO-free”反转有机太阳能电池[A].中国可再生能源学会光化学专业委员会.第一届新型太阳能电池暨钙钛矿太阳能电池学术研讨会论文集[C].中国可再生能源学会光化学专业委员会:中国科学院物理研究所清洁能源实验室,2014:141.
[77]温慧娟,张进成,陆小力,王之哲,哈微,葛莎莎,曹荣涛,郝跃.Improved mobility of AlGaN channel heterojunction material using an AlGaN/GaN composite buffer layer[J].Chinese Physics B,2014,23(03):493-496.
[78]曹梦逸,张凯,陈永和,张进成,马晓华,郝跃.High-efficiency S-band harmonic tuning GaN amplifier[J].Chinese Physics B,2014,23(03):508-512.
[79]曹荣涛,许晟瑞,张进成,赵一,薛军帅,哈微,张帅,崔培水,温慧娟,陈兴.Improvement in a-plane GaN crystalline quality using wet etching method[J].Chinese Physics B,2014,23(04):597-601.
[80]王冲,陈冲,何云龙,郑雪峰,马晓华,张进成,毛维,郝跃.Breakdown voltage and current collapse of F-plasma treated AlGaN/GaN HEMTs[J].Journal of Semiconductors,2014,35(01):65-68.
[81]陈浩然,杨林安,朱樟明,林志宇,张进成.基于AlGaN/GaN共振隧穿二极管的退化现象的研究[J].物理学报,2013,62(21):340-345.
[82]吕玲,林志宇,张进成,马晓华,郝跃.GaN基高电子迁移率晶体管的质子辐照效应研究[J].空间电子技术,2013,10(03):33-38.
[83]陈伟伟,马晓华,侯斌,祝杰杰,张进成,郝跃.The degradation mechanism of an AlGaN/GaN high electron mobility transistor under step-stress[J].Chinese Physics B,2013,22(10):512-515.
[84]姚艳丽,张进成.N面GaN材料及器件的研究进展[J].微电子学,2013,43(04):581-585+592.
[85]李亮,杨林安,周小伟,张进成,郝跃.Point defect determination by photoluminescence and capacitance-voltage characterization in a GaN terahertz Gunn diode[J].Chinese Physics B,2013,22(08):567-571.
[86]王冲,何云龙,郑雪峰,马晓华,张进成,郝跃.AlGaN/GaN high-electron-mobility transistors with transparent gates by Al-doped ZnO[J].Chinese Physics B,2013,22(06):646-649.
[87]王党会,许晟瑞,郝跃,张进成,许天旱,林志宇,周昊,薛晓咏.Study on the relationships between Raman shifts and temperature range for α-plane GaN using temperature-dependent Raman scattering[J].Chinese Physics B,2013,22(02):523-527.
[88]郝跃,薛军帅,张进成.Ⅲ族氮化物InAlN半导体异质结研究进展[J].中国科学:信息科学,2012,42(12):1577-1587.
[89]林志宇,张进成,周昊,李小刚,孟凡娜,张琳霞,艾姗,许晟瑞,赵一,郝跃.Influence of double AlN buffer layers on the qualities of GaN films prepared by metal-organic chemical vapour deposition[J].Chinese Physics B,2012,21(12):403-407.
[90]林志宇,张进成,许晟瑞,吕玲,刘子扬,马俊彩,薛晓咏,薛军帅,郝跃.斜切蓝宝石衬底MOCVD生长GaN薄膜的透射电镜研究[J].物理学报,2012,61(18):341-346.
[91]张伟,薛军帅,周晓伟,张月,刘子阳,张进成,郝跃.Effect of Si doping in wells of AlGaN/GaN superlattice on the characteristics of epitaxial layer[J].Chinese Physics B,2012,21(07):459-463.
[92]周小伟,许晟瑞,张进成,党纪源,吕玲,郝跃,郭立新.Luminescence of a GaN grain with a nonpolar and semipolar plane in relation to microstructural characterization[J].Chinese Physics B,2012,21(06):524-528.
[93]许晟瑞,刘子扬,姜腾,林志宇,周昊,张进成,郝跃.非极性a面GaN堆垛层错抑制研究[A].中国有色金属学会.第十二届全国MOCVD学术会议论文集[C].中国有色金属学会:中国有色金属学会,2012:51.
[94]林志宇,张进成,杜大超,许晟瑞,周昊,赵胜雷,戴扬,罗俊,郝跃.斜切蓝宝石衬底上N面GaN材料的MOCVD生长研究[A].中国有色金属学会.第十二届全国MOCVD学术会议论文集[C].中国有色金属学会:中国有色金属学会,2012:81.
[95]吕玲,张进成,薛军帅,马晓华,张伟,毕志伟,张月,郝跃.Neutron irradiation effects on AlGaN/GaN high electron mobility transistors[J].Chinese Physics B,2012,21(03):360-364.
[96]许晟瑞,张金风,谷文萍,郝跃,张进成,周小伟,林志宇,毛维.Structural and optical investigation of nonpolar a-plane GaN grown by metal-organic chemical vapour deposition on r-plane sapphire by neutron irradiation[J].Chinese Physics B,2012,21(02):543-547.
[97]薛晓咏,许晟瑞,张进成,林志宇,马俊彩,刘子扬,薛军帅,郝跃.Temperature dependences of Raman scattering in different types of GaN epilayers[J].Chinese Physics B,2012,21(02):548-552.
[98]吕玲,张进成,李亮,马晓华,曹艳荣,郝跃.3MeV质子辐照对AlGaN/GaN高电子迁移率晶体管的影响[J].物理学报,2012,61(05):390-397.
[99]马俊彩,张进成,薛军帅,林志宇,刘子扬,薛晓咏,马晓华,郝跃.Characteristics of AlGaN/GaN/AlGaN double heteroj unction HEMTs with an improved breakdown voltage[J].半导体学报,2012,33(01):47-51.
[100]马晓华,焦颖,马平,贺强,马骥刚,张凯,张会龙,张进成,郝跃.The reliability of AlGaN/GaN high electron mobility transistors under step-electrical stresses[J].Chinese Physics B,2011,20(12):399-403.
[101]王平亚,张金风,薛军帅,周勇波,张进成,郝跃.晶格匹配InAlN/GaN和InAlN/AlN/GaN材料二维电子气输运特性研究[J].物理学报,2011,60(11):605-610.
[102]张金风,王平亚,薛军帅,周勇波,张进成,郝跃.高电子迁移率晶格匹配InAlN/GaN材料研究[J].物理学报,2011,60(11):611-616.
[103]杨丽媛,郝跃,马晓华,张进成,潘才渊,马骥刚,张凯,马平.High temperature characteristics of AlGaN/GaN high electron mobility transistors[J].Chinese Physics B,2011,20(11):451-455.
[104]许晟瑞,郝跃,张进成,薛晓咏,李培咸,李建婷,林志宇,刘子扬,马俊彩,贺强,吕玲.Stress and morphology of a nonpolar a-plane GaN layer on r-plane sapphire substrate[J].Chinese Physics B,2011,20(10):421-425.
[105]毛维,杨翠,郝跃,马晓华,王冲,张进成,刘红侠,毕志伟,许晟瑞,杨林安,杨凌,张凯,张乃千,裴轶.The effect of a HfO_2 insulator on the improvement of breakdown voltage in field-plated GaN-based HEMT[J].Chinese Physics B,2011,20(09):373-379.
[106]马晓华,马平,焦颖,杨丽媛,马骥刚,贺强,焦莎莎,张进成,郝跃.Magnetotransport properties of two-dimensional electron gas in AlGaN/AlN/GaN heterostructures[J].Chinese Physics B,2011,20(09):385-388.
[107]刘子扬,张进成,段焕涛,薛军帅,林志宇,马俊彩,薛晓咏,郝跃.Effects of the strain relaxation of an AlGaN barrier layer induced by various cap layers on the transport properties in AlGaN/GaN heterostructures[J].Chinese Physics B,2011,20(09):433-437.
[108]毕志伟,胡振华,毛维,郝跃,冯倩,曹艳荣,高志远,张进成,马晓华,常永明,李志明,梅楠.Investigation of passivation effects in AlGaN/GaN metal-insulator-semiconductor high electron-mobility transistor by gate-drain conductance dispersion study[J].Chinese Physics B,2011,20(08):398-401.
[109]杜大超,张进成,欧新秀,王昊,陈珂,薛军帅,许晟瑞,郝跃.Investigation of yellow luminescence intensity of N-polar unintentionally doped GaN[J].Chinese Physics B,2011,20(03):459-463.
[110]许晟瑞,周小伟,郝跃,杨林安,张进成,毛维,杨翠,蔡茂世,欧新秀,史林玉,曹艳荣.在r面蓝宝石上生长的a面掺硅GaN的光学和电学性质研究[J].中国科学:技术科学,2011,41(02):234-238.
[111]马晓华,于惠游,全思,杨丽媛,潘才渊,杨凌,王昊,张进成,郝跃.Enhancement-mode AlGaN/GaN high electronic mobility transistors with thin barrier[J].Chinese Physics B,2011,20(02):457-461.
[112]马晓华,潘才渊,杨丽媛,于惠游,杨凌,全思,王昊,张进成,郝跃.Characterization of Al_2O_3 /GaN/AlGaN/GaN metalinsulator-semiconductor high electron mobility transistors with different gate recess depths[J].Chinese Physics B,2011,20(02):462-467.
[113]毛维,杨翠,郝跃,张进成,刘红侠,马晓华,王冲,张金风,杨林安,许晟瑞,毕志伟,周洲,杨凌,王昊.场板抑制GaN高电子迁移率晶体管电流崩塌的机理研究[J].物理学报,2011,60(01):584-589.
[114]毛维,杨翠,郝跃,张进成,刘红侠,毕志伟,许晟瑞,薛军帅,马晓华,王冲,杨林安,张金风,匡贤伟.Development and characteristic analysis of a field-plated Al_2O_3 /AlInN/GaN MOS-HEMT[J].Chinese Physics B,2011,20(01):12-16.
[115]张进成,李志明,郝跃,王昊,李培咸.GaN外延MOCVD设备反应室温度场的有限元分析及均匀性优化[J].中国科学:信息科学,2010,40(11):1537-1542.
[116]许晟瑞,郝跃,张进成,周小伟,曹艳荣,欧新秀,毛维,杜大超,王昊.The etching of a-plane GaN epilayers grown by metal-organic chemical vapour deposition[J].Chinese Physics B,2010,19(10):462-466.
[117]李志明,郝跃,张进成,陈炽,薛军帅,常永明,许晟瑞,毕志伟.立式MOCVD反应室中一种刻槽基座的热分析[J].人工晶体学报,2010,39(04):1072-1077.
[118]毕志伟,冯倩,郝跃,王党会,马晓华,张进成,全思,许晟瑞.AlGaN/GaN MIS-HEMT using NbAlO dielectric layer grown by atomic layer deposition[J].Chinese Physics B,2010,19(07):517-521.
[119]付小凡,王昊,史林玉,张忠芬,张进成,欧新秀,郝跃.非故意掺杂与半绝缘GaN缓冲层上的AlGaN/GaN异质结构的高温电子输运特性[J].科学通报,2010,55(16):1584-1588.
[120]李志明,郝跃,张进成,许晟瑞,毕志伟,周小伟.氮化物MOCVD反应室流场的仿真与分析[J].人工晶体学报,2010,39(01):226-231.
[121]李志明,郝跃,张进成.电磁加热的MOCVD反应室温度场的仿真与优化[A].中国有色金属学会.第十一届全国MOCVD学术会议论文集[C].中国有色金属学会:中国有色金属学会,2010:148-152.
[122]许志豪,张进成,段焕涛,张忠芬,朱庆玮,徐浩,郝跃.Stress,structural and electrical properties of Si-doped GaN film grown by MOCVD[J].半导体学报,2009,30(12):13-17.
[123]许志豪,张进成,张忠芬,朱庆玮,段焕涛,郝跃.The effects of vicinal sapphire substrates on the properties of AlGaN/GaN heterostructures[J].Chinese Physics B,2009,18(12):5457-5461.
[124]段焕涛,郝跃,张进成.Effect of a high temperature AlN buffer layer grown by initially alternating supply of ammonia on AlGaN/GaN heterostuctures[J].半导体学报,2009,30(09):1-4.
[125]倪金玉,郝跃,张进成,段焕涛,张金风.高温AlN插入层对AlGaN/GaN异质结材料和HEMTs器件电学特性的影响[J].物理学报,2009,58(07):4925-4930.
[126]段焕涛,谷文萍,张进成,郝跃,陈炽,倪金玉,许昇瑞.Characterization of GaN grown on 4H-SiC and sapphire by Raman spectroscopy and high resolution XRD[J].半导体学报,2009,30(07):22-26.
[127]张进成,郑鹏天,张娟,许志豪,郝跃.Degradation mechanism of two-dimensional electron gas density in high Al-content AlGaN/GaN heterostructures[J].Chinese Physics B,2009,18(07):2998-3001.
[128]张进成,郑鹏天,董作典,段焕涛,倪金玉,张金凤,郝跃.背势垒层结构对AlGaN/GaN双异质结载流子分布特性的影响[J].物理学报,2009,58(05):3409-3415.
[129]倪金玉,郝跃,张进成,杨林安.生长压力对GaN薄膜生长速率和结构特性的影响[J].科学通报,2009,54(09):1214-1217.
[130]倪金玉,张进成,郝跃,杨燕,陈海峰,高志远.AlGaN/GaN异质结载流子面密度测量的比较与分析[J].物理学报,2007,(11):6629-6633.[3]
国际报道
成果6次被国际半导体行业著名杂志Semiconductor Today专题报道。
学术报告
国际学术会议特邀报告10余次,国内学术会议邀请报告30余次,担任国际学术会议电子器件分会主席4次,在香山论坛、双清论坛做特邀报告5次,受邀在比利时鲁汶大学IMEC、北京大学、华中科技大学、厦门大学等知名高校和三星(西安)、华为海思、华虹宏力、中车集团等知名企业做学术报告或讲座30余次。
发明专利
授权发明专利80余项,实现专利转化和作价入股60余项,累计金额5000余万元。
成果应用
研究成果在北斗导航卫星、新型雷达等国家重大工程中成功应用,并为我国4G/5G通信器件提供核心技术支撑。
科研获奖
国家技术发明二等奖2项(排名第1和第2),省部级科技奖励9项,包括教育部技术发明一等奖1项(排名第1),国防技术发明一等奖1项(排名第4),陕西省科技一等奖4项(排名第2、3、4和6),国防科技进步二等奖2项(排名第2和6),教育部科技进步二等奖1项(排名第3)。
教学获奖
国家教学成果一等奖1项(排名第2),陕西省教学成果特等奖1项(排名第3)[1]
团队负责人:郝跃教授(中国科学院院士)
新型半导体材料与器件方向负责人:张进成教授(杰青/长江)
(1)宽禁带半导体(氮化镓)研究小组
张进成教授;许晟瑞教授;刘志宏教授;毛维教授;周弘教授;薛军帅副教授;赵胜雷副教授;张雅超讲师/博士;段小玲讲师/博士;张苇杭博士后
(2)超宽禁带半导体(金刚石/氧化镓/氮化铝)研究小组
张进成教授;冯倩教授;张春福教授;张金风教授;周弘教授;任泽阳博士后
(3)新型信息/能源/柔性器件研究小组
张进成教授;张春福教授;韩根全教授;常晶晶教授;王东副教授;刘艳副教授;林珍华副教授;马海蛟副教授;宁静副教授;陈大正讲师/博士,朱卫东讲师/博士;朱家铎讲师/博士;苏杰讲师/博士[1]
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